| Title | PZT thin film deposition techniques, properties and its application in ultrasonic MEMS sensors: A review |
| Publication Type | Conference Proceedings |
| Year of Conference | 2016 |
| Authors | Shilpa, G. D., K. Sreelakshmi, and M. G. Anantha Prasad |
| Conference Name | International Conference on Advances in Materials and Manufacturing Applications, IConAMMA 2016 |
| Volume | 149 |
| Date Published | 2016 |
| Publisher | Institute of Physics Publishing |
| ISBN Number | 17578981 (ISSN) |
| Keywords | Department of Mechanical Engineering, Scopus |
| Abstract | This paper describes an overview of the state of art in PbZrxTi1-xO3 (PZT)ferroelectric thin films and its applications in Micro Electro Mechanical Systems (MEMS). First, the deposition techniques and then the important properties of PZT films such as surface morphology polarization and ferroelectric properties are reviewed. Two major deposition techniques such as sol-gel and Magnetron sputtering are given and compared for the film surface morphology and ferroelectric properties. Finally, the application of PZT thin film in MEMS ultrasonic sensors is discussed. |
| DOI | 10.1088/1757-899X/149/1/012190 |
| Short Title | IOP Conf. Ser. Mater. Sci. Eng. |
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